发明名称 Method for forming a floating gate semiconductor device having a portion within a recess
摘要 A memory device, and a method for manufacturing same, comprises a semiconductor layer having a first surface and a second surface, and further having a trench therein. The memory device further comprises a transistor source within the first surface of the semiconductor layer, the source having a lower surface, wherein a bottom of the trench extends below the lower surface of the source. A transistor drain within the second surface of the semiconductor layer comprises a lower surface with the trench bottom extending below the lower surface of the drain and wherein the trench separates the source and drain. The memory device further comprises a transistor channel along at least the bottom of the trench, a floating gate at least partially within the trench, and a control gate overlying the floating gate.
申请公布号 US6184086(B1) 申请公布日期 2001.02.06
申请号 US19980218860 申请日期 1998.12.22
申请人 MICRON TECHNOLOGY INC. 发明人 KAO DAVID Y.
分类号 H01L29/423;(IPC1-7):H01L21/336 主分类号 H01L29/423
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