MANUFACTURE OF CERAMIC DEVICE UTILIZING MIXTURE WITH PHOTOSENSITIVE RESIN

摘要

PROBLEM TO BE SOLVED: To manufacture a ceramic device of a high degree of precision in a simple process by layering a lower electrode of a mixture of a photosensitive resin and a metal or piezoelectric/electrostrictive ceramic, a piezoelectric/ electrostrictive layer and an upper electrode to an upper part of a substrate and, exposing and patterning at once. SOLUTION: In exposing and patterning at once after forming each layer to manufacture a ceramic device, a lower electrode 12 is formed to a metal not including a photosensitive resin to an upper part of a substrate 10, and a piezoelectric/electrostrictive layer 14 is formed with the use of a mixture of a photosensitive resin and ceramic to an upper part of the lower electrode 12. An upper electrode 16 is formed with the use of a mixture of a photosensitive resin and a metal to an upper part of the formed piezoelectric/ electrostrictive layer 14. Then, exposure is carried out after a predetermined masking is provided to the upper electrode 16. The piezoelectric/electrostrictive layer 14 and the upper electrode 16 including the photosensitive resin are patterned to a predetermined pattern by the exposure. The ceramic device is thus completed.