| 摘要 |
PROBLEM TO BE SOLVED: To improve accuracy of a moving path of a driven matter such as a tool by compensating a movement of a movable member of an individual control body in one driving system according to an individual driving command with the control body on the basis of information on positions and attitudes of the movable member of the driving system. SOLUTION: An X-axis position subtracting circuit 14 subtracts an X-axis present position signal from a compensating X-axis command position signal and outputs an X-axis residual position signal. When the X-axis residual position signal is outputted, an X-axis position control circuit 15 outputs an X-axis command speed signal that increases speed with larger X-axis residual position signal, an X-axis speed subtracting circuit 17 subtracts speed of an X-axis present speed signal supplied from an X-axis differential circuit 16, and an X-axis speed control circuit 18 outputs to an X-axis moving table 2 current having larger current amount with larger X-axis residual speed signal. The X-axis moving table 2 is driven and moved by this current amount on an X-axis guide rail 1. |
