发明名称 Semiconductor device and method for fabricating the same
摘要 Semiconductor device and method for fabricating the same, which can improve an isolation characteristic and prevent a leakage current in conducting a borderless process, the device including a semiconductor substrate having an active region and a field region defined thereon, a bilayered gate electrode formed in one direction on the active region, a trench formed in the field region, an isolation region formed in, and on the trench to form a step to the semiconductor substrate so as to be projected from the semiconductor substrate, an insulating film barrier formed along a boundary of the active region projected from the semiconductor substrate, impurity regions in the semiconductor substrate in the active region on both sides of the gate line, a planar protection film having contact holes to the impurity regions on both sides of the active region, and a contact plug formed in each of the contact holes.
申请公布号 US6184071(B1) 申请公布日期 2001.02.06
申请号 US19990435361 申请日期 1999.11.08
申请人 HYUNDAI ELECTRONICS INDUSTRIES CO., LTD. 发明人 LEE SEUNG HO
分类号 H01L21/336;H01L21/60;H01L21/762;H01L21/8234;(IPC1-7):H01L21/336 主分类号 H01L21/336
代理机构 代理人
主权项
地址