发明名称 FOIL LEAK DETECTION CHAMBER
摘要 The invention relates to a chamber for the detection of leaks on foils (1). Said chamber comprises two frames (2, 3) which are connected together in an articulated manner, foils (4, 5) which are mounted on said frames, a test space (8) composed of the foils, a seal (12, 13, 18) arranged between the frames and at least one bore hole (7), preferably several bore holes, in at least one of the two frames (2, 3), which can be connected to a vacuum pump (15, 16, 22). In order to improve the chamber's closing features, said chamber comprises an edge zone (14) wherein a vacuum can be created independently of the test space (8) and into which said bore holes (7) run.
申请公布号 WO0107887(A1) 申请公布日期 2001.02.01
申请号 WO2000EP06390 申请日期 2000.07.06
申请人 LEYBOLD VAKUUM GMBH;WIDT, RUDI;ABELEN, THOMAS 发明人 WIDT, RUDI;ABELEN, THOMAS
分类号 G01M3/26;G01M3/22;G01M3/32 主分类号 G01M3/26
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