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发明名称
Chemisch verstärkte strahlungsempfindliche Harzzusammensetzung
摘要
申请公布号
DE69608584(T2)
申请公布日期
2001.02.01
申请号
DE19966008584T
申请日期
1996.02.12
申请人
JAPAN SYNTHETIC RUBBER CO., LTD.
发明人
YAMACHIKA, MIKIO;KUSAMA, MASATOSHI;KOBAYASHI, YASUTAKA;TSUJI, AKIRA
分类号
G03F7/004;C08F2/50;C08K5/00;C08K5/04;G03F7/038;G03F7/039;G03F7/09;H01L21/027;(IPC1-7):G03F7/09
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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