| 摘要 |
PROBLEM TO BE SOLVED: To apply a small amount of paste on a substrate precisely at a high sped without bubble catching, liquid dropping, nozzle clogging by the separation and sedimentation of a filler, etc., by equipping an exciter for micro-vibrating a coating liquid container fixed on a supporting means. SOLUTION: An exciter 6 such as an ultrasonic vibrator is installed around a coating liquid container 1 to micro-vibrate the container 1. A temperature adjusting device 7 is installed to enclose the container 1 with the exciter 6. All the above elements are fixed/supported by a supporting means 8. In the spot application of paste to a necessary place on a substrate 9, an entire apparatus ranging from an adapter 4 to a needle 3 is moved vertically in a prescribed stroke through the support member 8. When the needle 3 reaches the lowest position, the container 1 is pressurized to eject the paste 10. The paste, while keeping a minute space between it and the inner wall of the container 1 by ultrasonic vibration, moves smoothly without sticking on the inner wall.
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