发明名称 |
In-situ/self-propelled polishing pad conditioner and cleaner |
摘要 |
A non-motorized polishing pad conditioner and cleaner having a free-wheeling conditioner head with a plurality of channels to direct the flow of a cleansing fluid; a hollow shaft connected to a fluid source; and a conditioning pad to facilitate loosening the debris found on a polishing pad wherein the pad conditioner and cleaner is self-propelled upon contact with a rotating polishing pad. A cantilever may be used to attach the conditioner and cleaner adjacent to the polishing apparatus. The cantilever may contain a motorized element for extending and retracting the conditioner and cleaner over the radius of a polishing pad such that the entire surface of the polishing pad may be conditioned and cleaned. A method of conditioning and cleaning a polishing pad while simultaneously polishing a silicon wafer is also described.
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申请公布号 |
US6179693(B1) |
申请公布日期 |
2001.01.30 |
申请号 |
US19980166785 |
申请日期 |
1998.10.06 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BEARDSLEY GARY JOSEPH;HUYNH CUC KIM;WALKER DAVID LOUIS |
分类号 |
B24B37/04;B24B53/013;B24B53/12;(IPC1-7):B24B1/00;B24B55/00 |
主分类号 |
B24B37/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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