| 摘要 |
A miniature, compact, electronic controlled pressure regulator system (20) provides highly accurate pressure control in a fluid delivery system. The system is adapted for providing a constant pressure condition to a number of fluid lines (34a-d) which supply a fluid flow to a number of mass flow controllers (22a-d). The system is a closed loop electronic pressure control system. Pressure fluctuations caused by variations are continuously monitored and adjusted by a digital controller (24) such that a pressure regulator (26) adjusts its shut-off valve accordingly to maintain its outlet pressure. When used with a downstream orifice, the system holds a precise pressure to that orifice, thereby controling flow. Also, the system can be used to replace an MFC, eliminating the liquefied gas phase change problem. |
