发明名称 ALIGNER FOR BAND-LIKE METAL THIN PLATE AND METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide an aligner and a method for a band-like metal thin plate, capable of suppressing power consumption, extending service life of a light source, and preventing thermal effects exposed surface and a pattern plate, without reducing production efficiency. SOLUTION: A light source L makes a light irradiated along an optical path LW toward an exposure target surface R, and a shutter 10 blocks the light from the light source L to the exposure surface R midway of the optical path LW. A motor 20 displaces this shutter 10 to an exposure position and a shading position. An electrical controller EC changes a luminous intensity of the light source L, so that the luminous intensity of the light source L when the shutter 10 is positioned at the shading position becomes lower than the luminous intensity of the light source L, when the shutter 10 is positioned at the exposure position.
申请公布号 JP2001028232(A) 申请公布日期 2001.01.30
申请号 JP19990201200 申请日期 1999.07.15
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 KITAMURA FUJIKAZU
分类号 H01J9/14;G03B27/04;G03F7/20;(IPC1-7):H01J9/14 主分类号 H01J9/14
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