| 摘要 |
PROBLEM TO BE SOLVED: To provide a vertical probe card having excellent thermal stress resistance and high rigidity by reinforcing support plates, while enhancing the reliability of probe testing accuracy by preventing movement of a needle contact end, and suited for application to a multiple pin configuration used at a high temperatures, particularly a DRAM. SOLUTION: In this vertical probe card, a number of probing needles 4 are arranged between both upper and lower support plates 5, 3, and each needle is connected at its connecting end 4a to a lead part 7 via a guide hole 14 provided in the upper support plate 5 and has its contact end 4b passed through and supported against a guide hole 13 in the lower support plate 3. Reinforcing plates 20 made from carbon fiber reinforced plastic(CFRP) are bonded to both the front and back faces of the base 21 of the lower support plate to form the lower support plate 3 integrally, and window hole parts for exposing the guide hole 13 are bored in the reinforcing plates.
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