| 摘要 |
PROBLEM TO BE SOLVED: To enlarge a connection part for connecting the rear ends of probes to each other, even with small intervals of the probes arranged. SOLUTION: This probe card comprises a plurality of probe units 32 arranged in the form of a grid on a substrate 30, each of the probe units 32 having a plurality of probes arranged in parallel on support 48, with the needle tip and needle end of each probe bent in opposite directions across a needle main body. The probes 46 of each probe unit 32 are received in slots 44 formed in the substrate 30. The needle rears of adjacent probes 46 received in the same slot 44 are bent at different angles to the needle main bodies. Thus, the interval between the rear ends of the adjacent probes 46 is increased.
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