METHOD AND DEVICE FOR REMOVING TREATING SOLUTION FROM TREATING SOLUTION PATH

摘要

PURPOSE: To effectively purge a treating solution from a treating solution carrying system by providing a purge valve effectively bonded to a treating solution path on the space between 1st and 2nd insulating valves and effectively bonded to a purge gas source and a pump valve effectively bonded to a pump. CONSTITUTION: A 1st short pass insulating valve and a 2nd short pass insulating valve prescribe the space between the small parts (17)' of a treating solution path (17), e.g. the space between two insulating valves at the time of being clogged. After that, the part of a purge gas line (29) on the space between the treating solution path (17) and a short pass purge valve (45) and the part of a short pass pump line (49) between the treating solution path (17) and the short pass pump valve (47) purge a treating solution by opening the short pass purge valve (45) and the short pass pump line (49). The pump/purge cycle is desirably used for the space between the purges.