发明名称 DEVICE MANUFACTURING APPARATUS AND METHOD
摘要 PROBLEM TO BE SOLVED: To make it possible to detect troubles and premonitory sign of troubles which no software can accurately detect by providing means for converting sound in an apparatus or vibration from a member to electrical signal and means for storing this electrical signal. SOLUTION: Upon pressing an operation sound monitor button, operation sound from an apparatus collected by a sound collecting microphone 118 in the apparatus is released from a speaker 117 and monitored. Upon pressing an operation sound storing button, the operation sound monitored is stored in an auxiliary storing apparatus 112. Upon pressing a stop button, monitoring and storing operation sound stop. These buttons are provided in a keyboard of a console unit 110. The operation sound within the fixed period of time in the apparatus is always buffered in a memory, and a function storing, upon occurred error, the operation sound within the fixed period of time before the occurrence of error and the operation sound within the fixed period of time after the occurrence of error, is provided.
申请公布号 JP2001023876(A) 申请公布日期 2001.01.26
申请号 JP19990190422 申请日期 1999.07.05
申请人 CANON INC 发明人 OGAWA OSAMU
分类号 H01L21/027;G03F7/20;(IPC1-7):H01L21/027 主分类号 H01L21/027
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