VERY NARROW-BAND FLUORINE LASER DEVICE

摘要

PROBLEM TO BE SOLVED: To reduce the line width of a fluorine laser almost to 0.2 to 0.3 pm without using a band narrowing element such as an etalon. SOLUTION: An oscillator 11 has a laser chamber 15 arranged in a stable type resonator composed of an output mirror 13 and a total reflecting mirror 14. The laser chamber 15 is filled with laser gas to an about 0.8 atmosphere. Consequently, when laser oscillation is carried out by discharging in the laser chamber 15, a laser light L10 of about 0.3 pm in wavelength width is taken out. An amplifier 12 increases the power of the laser light L10. A laser light L20 of >=10 mJ in laser output is emitted by the amplifier 12 so that the wavelength width is about 0.3 pm.