THIN-FILM PIEZOELECTRIC BIMORPH ELEMENT, MECHANICAL DETECTOR AND INKJET HEAD USING THE SAME, AND METHODS OF MANUFACTURING THE SAME

摘要

PURPOSE: A thin film piezoelectric bimorph element and a method for manufacturing thereof are provided to improve a performance, to compact the size and to reduce the manufacturing costs. CONSTITUTION: First and second piezoelectric thin films(2,3) are formed by sputtering on the both surfaces of a metal thin plate(1) which are opposing relation to each other along the thickness thereof, while the respective states of polarizations of the first and second piezoelectric thin films(2,3) are controlled. A pair of electrode films(5) are formed on the respective surfaces of the first and second piezoelectric thin films(2,3) opposite to the metal thin plate(1).