Cantilever unit and scanning probe microscope utilizing the cantilever unit

摘要

A cantilever unit comprises a substrate and a self-detecting type cantilever attached to the substrate. The self-detecting type cantilever has a cantilever portion extending from the substrate and a probe tip depending from the cantilever portion and detects a deflection of the cantilever portion when, for example, the probe tip is scanned over a surface of a sample. A visual identification portion of the cantilever unit permits the cantilever unit to be visually distinguished from other cantilever units.