发明名称 METHOD AND SYSTEM FOR VISUAL INSPECTION
摘要 PROBLEM TO BE SOLVED: To obtain method and system for visual inspection which can deal with a plurality of types of inspection and can deal quickly with inspection for other items. SOLUTION: The visual inspection system performing a plurality of types of visual inspection comprises a plurality of inspection parameter setting programs 1 corresponding to the plurality of types of visual inspection, respectively, a section 2 for generating table data based on parameters set by the plurality of inspection parameter setting programs 1, and an inspection program 3 for performing visual inspection corresponding to each type using a data table generated at the data generating section 2.
申请公布号 JP2001015451(A) 申请公布日期 2001.01.19
申请号 JP19990181228 申请日期 1999.06.28
申请人 SONY CORP 发明人 TOMITANI HIROSHI
分类号 G01B11/30;G01B11/24;G01B11/245;H01L21/28;(IPC1-7):H01L21/28 主分类号 G01B11/30
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