| 摘要 |
<p>PROBLEM TO BE SOLVED: To simplify the process of forming a color filter, to shorten the work time and to reduce the film material. SOLUTION: In the production method of a solid state image pickup device, the color filter is formed while a laminated body 112 constituting a photoelectric conversion element and a pad 114 for bonding the photoelectric conversion element are arranged adjacent to each other on a semiconductor substrate 110 and while the region where a scribe line 116 is formed is exposed on the outer surface. The process is performed by directly forming color separation films 122A. 122B, 122C which constitute the color filter on the upper surface of the laminated body 112. Then after the color separation films 122A. 122B, 122C are formed, a process of wiring to the pad 114 and of adhering a microlens is performed to complete the solid state image pickup device. Thereby, a process of forming a flattening film or topcoat film on the laminated body can be omitted, and the working power and time for the film forming process as well as the film material can be reduced.</p> |
