| 摘要 |
PROBLEM TO BE SOLVED: To obtain a method by which a soft magnetic thin film, having a small coercive force and high rectangular hysteresis characteristic, can be manufactured. SOLUTION: In a method for manufacturing a soft magnetic thin film, the soft magnetic thin film is manufactured in such a way that a thin film containing iron is formed on a substrate by electroplating and subjected to heat treatment for a period of 0.08-1.6 seconds at a temperature of 600-800 deg.C. Consequently, the soft magnetic thin film having a coercive force of 15 Oe or lower and an aspect ratio of 70% or higher can be manufactured with an extremely short-time heat treatment. When this method is used, the soft magnetic thin film having a small coercive force and a high rectangular hysteresis characteristic can be obtained through short-time heat treatment. |
