| 摘要 |
<p>A lift and rotate assembly (200), for use in a workpiece processing station (400), which includes a body (210) having a slim profile and pins (250) located on opposite sides for mounting the assembly onto a tool frame (100). The lift and rotating assembly (200) further includes a rotating mechanism (285) with motor (305), which motor is located in and coupled to a processing head (205) to the body (210), and is used for rotating the process head (205) with respect to the body (210). The lift and rotate assembly (200) includes a lift mechanism (255) and a cable assembly (295) including a common cable which provides at least one of signals, gases and fluids to the process head (205).</p> |
