| 摘要 |
An apparatus (10) is provided for electrical testing of a substrate having a plurality of terminals. The apparatus includes a frame, a probe card (14), a translation device (16), an alignment device (18), and a holder (20). The probe card (14) includes a probe card backing member (28) and a plurality of probes (30) extending from the probe card backing member and is secured to the frame (12). The translation device is secured to the frame. The alignment device is located on the translation device. The holder is capable of holding a substrate and is secured to the alignment device . The alignment device is operable to cause alignment movement of the holder past the probe card so that selected ones of the terminals are brought into alignment with selected ones of the probes. The translation device is operable to cause translational movement, transverse to the alignment movement, of the alignment device with the holder towards the probe card. A respective one of the terminals is so brought into contact with a respective contact region of a respective one of the probes.
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