| 摘要 |
<p>PROBLEM TO BE SOLVED: To make uniform film thickness or the like, without being affected by fluctuations in wind and air pressure around a device by mixing gas containing tin tetrachloride and gas containing water in advance and discharging the obtained gas essentially containing the tin tetrachloride and water by turbulence, and forming a tin oxide film on a glass substrate. SOLUTION: A gas containing tin tetrachloride and water is discharged onto a glass substrate that travels in one direction essentially by turbulence, and a tin oxide film is formed by the reaction with tin tetrachloride enriched water occurring on a high-temperature glass substrate. In this manner, since turbulent gas is used for manufacturing the tin oxide film, air current balance cannot be lost even if wind and air pressure around the device fluctuate, thus obtaining a tin oxide film with a uniform film thickness and crystal particle diameter. More specifically, when the flow of gas is a laminar flow, eddies or the like are generated due to the influence of fluctuation factors and the tin oxide film tends to become nonuniform. However, when it is a turbulent flow, the influence is suppressed. In this manner, the obtained tin oxide film is uniform to the extent that it can be used as an electrode for a solar battery.</p> |
