| 摘要 |
PROBLEM TO BE SOLVED: To easily form a coating layer having high strength and corrosion resistance in high quality by a simple procedure by coating a quartz glass with aluminum oxide and immersing in an aqueous solution containing aluminum fluoride to impregnate aluminum component, oxygen component and fluorine component in the coating layer. SOLUTION: A quartz glass is coated with aluminum oxide. The coating is carried out preferably by a sol-gel method comprising the degreasing of a quartz glass with a solution containing a surfactant, etc., optionally after polishing the surface of the quartz glass and the coating of the degreased glass with a sol produced by the hydrolysis and polymerization of an Al-containing organic compound, etc., such as Al(OC3H7)3, gelling of the sol and heating of the product. The coated quartz glass is immersed in an aqueous solution containing aluminum fluoride, washed with ethanol, etc., and dried. The aqueous solution to be used in the immersion process is preferably produced by dissolving aluminum fluoride in hot water to include the aluminum fluoride at a concentration exceeding the solubility in water.
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