发明名称 Method of preparing integrated circuit devices containing isolated dielectric material
摘要 A capacitor comprising a first electrode, a second electrode, and a dielectric material and an organic isolation matrix forming at least one layer between the first and second electrodes is provided. Also provided are other integrated circuit devices containing a dielectric material and an organic isolation matrix in contact with the dielectric material.
申请公布号 US6174780(B1) 申请公布日期 2001.01.16
申请号 US19980139918 申请日期 1998.08.26
申请人 MICRON TECHNOLOGY, INC. 发明人 ROBINSON KARL M.
分类号 H01L21/02;(IPC1-7):H01L21/20 主分类号 H01L21/02
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