| 摘要 |
PROBLEM TO BE SOLVED: To monitor the life of a driving motor while a vacuum pump is protected and the degree of vacuum in a clean room is maintained. SOLUTION: This control device of a vacuum pump, which is provided with a vacuum pump 4 having a pump body 6 for sucking-evacuating gas in a clean room, and a driving motor 8 for driving the pump body 6, and a control means 14 for controlling the driving motor 8, is provided with a power measuring device 16 for measuring driving electic power supplied to the driving motor 8. When the measured power of the power measuring device 16 exceeds an abnormal value greater than a steady value, the control means 14 switches the vacuum pump 4 from a steady operating state to an abnormality investigating operating state for investigating the abnormality of the vacuum pump 4.
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