发明名称 SILICON INJECTING DEVICE OF RESIN APPLICATOR FOR MANUFACTURING SEMICONDUCTOR
摘要 PURPOSE: A silicon injecting device of a resin applicator for manufacturing a semiconductor is provided to stabilize a product grade to minimize defective proportion by controllably operating silicon injection with a rotating cylinder as to supply the silicon in fixed quantity. CONSTITUTION: A silicon injecting device of a resin applicator for manufacturing a semiconductor comprises a syringe type silicon vessel(2), a bearing assembly(4), a belt(51) and a rotating rod(6). The silicon vessel is detachably engaged with a housing(1) having a screw insertion hole and a silicon injection hole(12) slantingly interconnected with the middle portion of the housing. The bearing assembly is rotatably engaged with the housing by inserting a screw into the screw inserting hole. On the bearing assembly is wound the belt engaged with a motor installed on the housing so as to transfer torque. An one side of the rotating rod is inserted into an insertion hole(13) of the housing. The other side of the rod is engaged with one side of a connecting rod(9) connected with the rotating cylinder so as to controllably operate the rotating rod through an operation of the cylinder.
申请公布号 KR100274830(B1) 申请公布日期 2001.01.15
申请号 KR19980058316 申请日期 1998.12.24
申请人 PROTEC CO., LTD. 发明人 CHOI, SEUNG HWAN
分类号 (IPC1-7):H01L21/00 主分类号 (IPC1-7):H01L21/00
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