POLISHING PAD HAVING MINUTE POLYMERIC MICROELEMENT BUNDLE OF CELLULAR TISSUE STRUCTURE AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A polishing pad having a minute polymeric microelement bundle of cellular tissue structure and a manufacturing method thereof are provided to collect efficiently and fix slurry particles through an opened part of polymeric microelements, so that the efficiency of polishing is improved and the time for work is reduced. CONSTITUTION: In a polishing pad, a polymeric microelement is formed in a bundle of a minute polymeric microelement(36), and a large quantity of polymeric microelements are impregnated in a polymeric matrix(32) in which urethane and hardener are mixed. The part of a minute polymeric microelement bundle(34) exposed to a surface course of the polymeric matrix by grinding forms the cellular tissue structure, so that the collection and the transmission of slurry are facilitated. The size of the minute polymeric microelement bundle is 10-300μm.