摘要 |
PURPOSE: A method of making a liquid crystal display is provided to prevent a data line from being damaged due to etchant by utilizing a titanium metal film and a molybdenum metal film as a metal film for the data line. CONSTITUTION: The method of making a liquid crystal display is comprised of forming a metal film(10) for a data line on a doped amorphous silicon layer(5). The metal film(10) has a stack structure where a titanium metal film(6) and a molybdenum metal film(7) are sequentially stacked. A photoresist film pattern(11) for exposing a predetermined portion is formed on the molybdenum metal film(7). The molybdenum metal film(7) and the titanium metal film are sequentially etched by use of the photoresist film pattern as a mask.
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