发明名称 METHOD OF MAKING LIQUID CRYSTAL DISPLAY
摘要 PURPOSE: A method of making a liquid crystal display is provided to prevent a data line from being damaged due to etchant by utilizing a titanium metal film and a molybdenum metal film as a metal film for the data line. CONSTITUTION: The method of making a liquid crystal display is comprised of forming a metal film(10) for a data line on a doped amorphous silicon layer(5). The metal film(10) has a stack structure where a titanium metal film(6) and a molybdenum metal film(7) are sequentially stacked. A photoresist film pattern(11) for exposing a predetermined portion is formed on the molybdenum metal film(7). The molybdenum metal film(7) and the titanium metal film are sequentially etched by use of the photoresist film pattern as a mask.
申请公布号 KR20010004022(A) 申请公布日期 2001.01.15
申请号 KR19990024607 申请日期 1999.06.28
申请人 HYNIX SEMICONDUCTOR INC. 发明人 LIM, SEONG SIL;SON, GON
分类号 G02F1/136;(IPC1-7):G02F1/136 主分类号 G02F1/136
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