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发明名称
Pad conditioner
摘要
<p>본 고안의 패드 콘디셔너에 관한 것으로, 패드 콘디셔너의 디스크를 링 모양으로 변형하고 디스크에 압력을 인가하고 회전 및 좌우 운동을 실시하게 하는 지지봉은 디스크의 모양을 따라 방사형으로 형성하므로써 패드를 항상 일정하게 유지하여 연마막의 연마량 및 특성을 일정하게 관리할 수 있고 패드의 수명도 개선시켜 원가 절감을 이룰 수 있을 뿐만 아니라 연마중에 발생되는 결함을 효과적으로 감소시킬 수 있는 패드 콘디셔너가 개시된다.</p>
申请公布号
KR20010001490(U)
申请公布日期
2001.01.15
申请号
KR19990011939U
申请日期
1999.06.29
申请人
发明人
分类号
主分类号
代理机构
代理人
主权项
地址
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