| 摘要 |
PROBLEM TO BE SOLVED: To provide a real time shape deformation measuring method for obtaining the numerical information of the shape or deformation amounts of a sample in a real time, and for obtaining the phase distribution picture of the sample for discriminating a measurable region and immeasurable region in a real time. SOLUTION: While a lattice pattern to be projected to a sample or the phase of an interference stripe indicating the deformation of the sample is continuously shifted, four lattice pictures or interference stripe pictures are successively obtained by each phase shift in one cycle, and updated and stored in corresponding first - fourth frame memories 24A-24D. Then, the luminance value of a corresponding phase value is read for each pixel from a phase calculation map 26 for storing a luminance value corresponding to a preliminarily calculated phase value based on the luminance difference of the corresponding pixels of each picture stored in the first - fourth frame memories. Thus, the phase distribution picture of the sample can be obtained in a real time.
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