| 摘要 |
<p>PROBLEM TO BE SOLVED: To exactly process an object to be processed with a laser by easily and precisely measuring the generating position or strength of ultrasonic waves generated in irradiating the object to be laser-processed with laser beams. SOLUTION: This device is provided with a laser device 1 for generating modulating laser beams, an irradiating means 7 arranged so as to be displaceable to the object 10 to be processed for irradiating the object to be processed with the modulating laser beams, an ultrasonic receiving means 8 arranged on the same axis as the irradiating means for receiving ultrasonic waves generated from a laser beam irradiating point on the object to be processed, and a signal processor 14 for calculating the propagating distance of the ultrasonic waves from a signal from the ultrasonic receiving means and a signal from the laser device, and for calculating the shape of the object to be processed from the propagating distance and the position and attitude information of the irradiating means.</p> |
