| 摘要 |
PROBLEM TO BE SOLVED: To offer a probe card with a light source guide which can stably irradiate a semiconductor chip to be inspected with light having uniform illuminance, avoiding variations in illuminance among probe cards. SOLUTION: This probe card with a light source guide is equipped with a probe card substrate 1; a hole 3 provided in the center of the probe card substrate 1; probe needles 5 provided near the hole 3 on the bottom face of the probe card substrate 1, the ends of which are pointed toward the underside of the hole 3 and make contact with a semiconductor chip to be inspected when performing inspection; and a light source guide 7 provided on the top face of the probe card 1, which is used for installing a LED 6.
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