发明名称 MANUFACTURE OF SUBSTRATE FOR INSPECTION
摘要 PROBLEM TO BE SOLVED: To securely connect the probe terminal provided on a membrane sheet and the wiring layer of a wiring board. SOLUTION: On the edge of a wiring board 10, there are four positioning means 13 in the plane direction or the like which determine the position in the plane direction of a membrane sheet 11 with high accuracy, a positioning means 14 in the peripheral direction which determines the position of the membrane sheet 11 in the peripheral direction with high accuracy, and two securing means 15 or the like which secure the membrane sheet 11 to the wiring board 10. After determining the position in the plane direction of the membrane sheet 11 relative to the wiring board 10 by using the positioning means 13 in the plane direction, the position in the peripheral direction of the membrane sheet 11 relative to the wiring board 10 is determined by using the positioning means 14 in the peripheral direction, and then the membrane sheet 11 is secured to the wiring board 10 by using the securing means 15.
申请公布号 JP2001007167(A) 申请公布日期 2001.01.12
申请号 JP19990176941 申请日期 1999.06.23
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 FURUMOTO KENJI;MAI MIKIYA;NAKAYAMA TOMOYUKI;SANEMORI TATEO
分类号 G01R1/073;H01L21/66;(IPC1-7):H01L21/66 主分类号 G01R1/073
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