METHOD FOR PRODUCING QUARTZ GLASS MEMBER AND QUARTZ GLASS MEMBER PRODUCED THEREBY

摘要

A method for producing a quartz glass member which comprises a step of reacting a silicon compound in oxy-hydrogen flame by using a burner having a concentric multiple structure, to thereby prepare fine quartz glass particles, a step of depositing the fine quartz glass particles on a supporter, which is arranged to be opposed to the burner and is rotating, with a temperature distribution which is symmetric with respect to the rotating axis of a quartz glass ingot in at least one plane perpendicular to the rotating axis and has a maximum value between the center and the periphery of the plane, to thereby provide a quartz glass ingot, and a step of cutting, from the above quartz glass ingot, a quartz glass member which has signed double refraction values increasing monotonously from the center toward the periphery of a face perpendicular to the rotating axis of the above quartz glass ingot, the signed double refraction values being determined based on double refraction values and the direction of the advanced phase axis thereof measured at plural positions of the plane.