发明名称 METHOD FOR PRODUCING AN ELECTRODE ARRANGEMENT
摘要 The invention relates to a method for producing an electrode arrangement in a substrate (1), whereby individual electrode areas (2a, 2b, 6a, 6b) are arranged at a lateral distance and/or are vertically offset in relation to each other. According to the inventive method, at least one electrically conductive coating (2, 6) is applied to a surface of a substrate (1) in order to form said electrode areas. In another step, a stamping element (3, 7) is applied to the surface in such a way that a lateral distance and/or vertical offsetting occurs between individual electrode areas (2a, 2b, 6a, 6b). The stamping element is subsequently withdrawn, leaving an electrode structure in which individual electrode areas are separated from each other by a lateral distance and/or vertical offsetting. The inventive method makes it possible to produce electrode structures in the micro and namometric range in a surpisingly simple cost-effective manner.
申请公布号 WO0103178(A1) 申请公布日期 2001.01.11
申请号 WO2000DE02094 申请日期 2000.06.26
申请人 FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.;BEUTEL, HANS-JOERG;KATZENBERG, FRANK;SCHULZ, HUBERT;HOFFMANN, THOMAS 发明人 BEUTEL, HANS-JOERG;KATZENBERG, FRANK;SCHULZ, HUBERT;HOFFMANN, THOMAS
分类号 H01L21/768 主分类号 H01L21/768
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