Multilevel electro-mechanical grating device and a method for operating a multilevel mechanical and electro-mechanical grating device,申请号US09/216559-传众专利搜索

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发明名称	Multilevel electro-mechanical grating device and a method for operating a multilevel mechanical and electro-mechanical grating device
摘要
申请公布号	US6172796(B2)	申请公布日期	2001.01.09
申请号	US09/216559	申请日期	1998.12.18
申请人		发明人
分类号		主分类号
代理机构		代理人
主权项
地址

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