| 摘要 |
PURPOSE: A thin film micromirror array-actuated is provided to prevent diffused reflection at a mirror surface at a peripheral position of a post by forming a non-reflection part at a hole formed at the mirror surface. CONSTITUTION: The thin film micromirror array-actuated comprises an active matrix(5), an actuator(65) and a mirror(75). The actuator(65) is formed over the active matrix(5), and the mirror(75) adjusts a light path according to the degree of driving of the actuator(65). A non-reflection part(76) is formed on a center of an upper surface of the mirror(75), and is fabricated from low-reflection chrome. A mirror post(70b) supports the mirror(75) at a the center of the upper surface of the mirror(75).
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