| 摘要 |
PURPOSE: A method for manufacturing of amplifier of multi-component system oxide glass composition having a multiple structure by laying a passive function of polymer waveguide layer on an amplification function of multi-component glass waveguide layer is provided, which gives the characteristics of passivity and modulation to elements having only amplification function, resulting in multi-functional and integrated photo elements at a low price. CONSTITUTION: The method comprises the steps of: preparing a multi-component system glass thin film(2), under-clad layer, on a Si-, Al- or silicon-substrate(1) by aerosol flame deposition(AFD); layering an Er-doped core layer(3); forming a light multi-component glass waveguide(6) by lithograph and etching, then ion-exchange method, manufacturing an amplifier; laying passivity waveguide(8) composed of polymer by lithograph and etching on the multi-component glass waveguide; forming a polymer layer(9), upper-clad layer, a resulting in multiple waveguide structure having passivity and amplification function at a time.
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