NARROW BAND EXCIMER LASER WITH A PRISM-GRATING AS LINE-NARROWING OPTICAL ELEMENT

摘要

A grating or grism, a prism having a grating surface element for use with a line-narrowing package of an excimer or molecular fluorine laser includes a highly reflective (HR) and/or an anti-reflective (AR) dielectric coating. The grating may also serve as a resonator reflector, thus having a dielectric HR coating. The grating may be disposed in front of an HR mirror and thus have a dielectric AR coating. The grating may be used as an output coupler and thus be partially reflective with or without a coating. The grism has a dielectric AR coating on any transmissive surface and a dielectric HR coating on any reflective surface. The grism may be configured to be disposed in the laser resonator with the grating surface facing the discharge chamber and serving as a HR reflecting resonator reflector. The prism portion may face the discharge chamber and the grating portion serving as a HR reflecting resonator reflector.