发明名称 Method of making memory device with an element splitting trench
摘要 A semiconductor device comprising: a substrate, a gate insulating layer formed on the substrate, insulating isolation layers formed on each side of the gate insulating layer, an impurity diffusion region formed in the substrate beneath the insulating isolation layer, a first conductive layer formed on both the gate insulating layer and the insulating isolation layer, and an element splitting trench which split up at least the insulating isolation layer and the impurity diffusion layer into two parts respectively and form a trench in the substrate and is buried with conductive material.
申请公布号 US6168994(B1) 申请公布日期 2001.01.02
申请号 US19980185695 申请日期 1998.11.04
申请人 SONY CORPORATION 发明人 IKEDA NAOSHI
分类号 H01L21/76;H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/824 主分类号 H01L21/76
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