Method of fabricating thin-film photovoltaic module

摘要

This invention provides a method of fabricating a thin-film photovoltaic module (1) having a structure in which a plurality of thin films (3-5) are stacked. This method includes postulating a substrate temperature during laser scribing for each thin film (3-5), determining a scanning pattern by taking account of the size of the substrate (2) at the postulated temperature, and dividing each thin film (3-5) in accordance with the scanning pattern while keeping the substrate temperature at the postulated temperature or a temperature in its neighborhood.