发明名称 Semiconductor testing equipment
摘要 Semiconductor testing equipment for the present invention includes a command pattern matching circuit 29, a timer circuit 17, an AND circuit 23 which ANDs acceptable product decision signal for inspecting decision change points for a device while being tested, and an OR circuit 24 for ORing the output signal of the timer 17 and the AND circuit 23. It also includes a pattern sequence control circuit 28 for changing the pattern sequence control operation upon receipt of the output signal of this OR circuit 24. The semiconductor testing equipment 1 monitors the changes in the outputs of the pins for all the devices under test 3, 3, . . . being simultaneously tested, detects acceptable products signals for the devices, when executing a specified mode processing of devices under test 3, 3, . . . , ends decision processing in the shortest time, and when the same decision process is repeated more than twice, invalidates the decision for the known defective devices under test 3, 3, . . . in the first processing, reduces the decision processing time and significantly reduces the testing time.
申请公布号 US6163875(A) 申请公布日期 2000.12.19
申请号 US19980063640 申请日期 1998.04.21
申请人 ANDO ELECTRIC CO., LTD. 发明人 SUZUKI, NORIYUKI
分类号 G01R31/26;G01R31/28;G01R31/30;G01R31/3193;G11C29/56;H01L21/822;H01L27/04;(IPC1-7):G06F17/50 主分类号 G01R31/26
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