| 摘要 |
PROBLEM TO BE SOLVED: To enable a microlens material to have a sufficient adhesive property by forming a microlens by performing oxygen plasma ashing on a flattened organic film formed on a solid-state image pickup device structure. SOLUTION: After a flattened organic film 1a is formed on a solid-state image pickup device structure, a microlens material 11 is applied to the flattened surface of the film 1a. At the applying of the material 11 to the flattened surface, a surface treatment that improves the compatibility between the film 1a and the material 11 is performed in advance on the flattened surface. The ideal surface treatment is appropriately performed by means of oxygen plasma ashing. When the oxygen plasma ashing is performed on the flattened surface, the organic film 1a can be reformed to a hydrophilic film. Consequently, the adhesion between the microlens material 11 and organic film 1a can be improved significantly and the peeling, etc., of a lens resist pattern can be prevented effectively at developing of the resist pattern.
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