Waveguide junction with silicon nitride

摘要

A silicon on insulator rib waveguide 11 is joined to a silicon nitride waveguide 17 by depositing a dielectric SiO2 layer 16 on the end face 13 of the rib waveguide and on a substrate 3, and depositing another dielectric layer 17 on layer 16, thereby aligning the waveguides. Silicon oxynitride or polymer materials may also be used for layer 16. The waveguides may be used in a Mach-Zender interferometer.