| 摘要 |
PROBLEM TO BE SOLVED: To improve the insulating property between a magnetoresistive element and an upper layer magnetic shield by forming an insulating film between a conductor film and a second nonmagnetic insulating film which forms an upper layer magnetic gap. SOLUTION: A lower layer magnetic shield 7 and an upper layer magnetic shield 8 are formed from a soft magnetic material. A nonmagnetic insulating film 11 is formed on both ends of the lower layer magnetic shield 7 formed on a substrate 2, while a protective film 12 consisting of a nonmagnetic insulating material is formed on the upper layer magnetic shield 8 formed on an upper layer magnetic gap. An insulating film 13 is formed between a conductor film 5 and the upper layer magnetic gap 10. The insulating film 13 is formed from an insulating material such as Al2O3. The film is preferably formed into larger film thickness than the film thickness of the nonmagnetic insulating film as the upper layer magnetic gap 10. Thus, the insulating property between the magnetoresistive element 6 and the upper layer magnetic shield 8 can be improved.
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