| 摘要 |
PURPOSE: A nozzle assembly for a scrubber system of an equipment for manufacturing a semiconductor device is provided to increase a contact ratio with an exhaust gas and a reaction ratio with the exhaust gas, by uniformly spraying cleaning water in a broad region of a cleaning chamber. CONSTITUTION: A nozzle assembly for a scrubber system(40) of an equipment for manufacturing a semiconductor device comprises a water supply pipe, a plurality of branch pipes(78) and a plurality of nozzles. The water supply pipe is coupled to a cleaning water supply unit, established in a vertical direction. The pluralities of branch pipes are crossing each other, horizontally extended in both sides of the water supply pipe, and vertically having a constant interval from each other. The pluralities of nozzles are established in the respective branch pipes.
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