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发明名称
PROCESSING APPARATUS AND METHOD FOR PROCESS
摘要
申请公布号
KR100276127(B1)
申请公布日期
2000.12.15
申请号
KR19940005067
申请日期
1994.03.15
申请人
TOKYO ELETRON TOHOKU LTD;TOKYO ELECTRON LIMITED
发明人
IWABUCHI, KASUHIKO;OKURA, RYOICHI;ASANO, DAKANOBU
分类号
H01L21/205;H01L21/22;H01L21/31;H01L21/677;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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