| 摘要 |
<p>PROBLEM TO BE SOLVED: To correct a short circuit defect between an upper electrode and a lower electrode due to a pinhole defect in an auxiliary capacitor part while the state of an active matrix substrate is present. SOLUTION: When a short circuit is produced between a lower electrode and an upper electrode due to a pinhole 12 of an insulating film 7 in an auxiliary capacitor part consisting of a common signal wiring 3 or a scanning wiring (lower electrode), and an insulating film 7 and a pixel electrode 5 (upper electrode), a part of the upper electrode 13 near the short circuit defect 12 is removed by irradiation of light energy. Since the defect is corrected in the state of the active matrix substrate before lamination with counter substrate, no influence is added to the refractive index or transmittance of a glass substrate or a color filter forming part or on the alignment of a liquid crystal, or defective products are not sent to the succeeding processes. By using a short wavelength laser of UV rays at <=360 nm wavelength, for example, by using the fourth order harmonic waves of a YAG laser, only the upper electrode near the short circuit defect can be removed with good accuracy without adding influences on the lower films.</p> |
