发明名称 PIXEL STRUCTURE HAVING A BOLOMETER WITH SPACED APART ABSORBER AND TRANSDUCER LAYERS AND AN ASSOCIATED FABRICATION METHOD
摘要 <p>A pixel structure is provided that has a substrate (12) and a bolometer disposed upon the substrate that includes a transducer (14) and an absorber (16) that have been spaced apart from each other and from the substrate so as to permit the transducer and the absorber to be separately optimized. The absorber is in thermal contact with the transducer via a thermally conductive post (24) extending from the transducer to the absorber. In addition to the pixel structure, a method is provided for fabricating a pixel structure having a bolometer in which the transducer and absorber are spaced apart.</p>
申请公布号 WO2000075616(A1) 申请公布日期 2000.12.14
申请号 US2000013431 申请日期 2000.05.16
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